IMS- Micro/Nano Fabrication Facility
Processing (Older)
Thin Film Materials

Metals

Au - Gold

 Gold
          


 Chemical Properties
 
  • Boiling Point: 2970C
  • Melting Point: 1948C
 


Ag - Silver

 Silver
          
 Chemical Properties
 
  • Boiling Point:3924C
  • Melting Point: 1763C


Cu - Copper

 Copper
          
 Chemical Properties
 
  • Boiling Point: 4644C
  • Melting Point: 1984C


Ni - Nickel

 Nickel
          
 Chemical Properties
 
  • Boiling Point: 5275C
  • Melting Point: 2650C


Pt - Platinum

 Platinum
          
 Chemical Properties
 
  • Boiling Point: 6917C
  • Melting Point: 3215C


Ti - Titanium

 Titanium
          
 Chemical Properties
 
  • Boiling Point: 5948C
  • Melting Point: 3034C


Fe - Ion

 Iron
          
 Chemical Properties
 
  • Boiling Point: 5184C
  • Melting Point: 2800C


Al - Aluminum

 Aluminum 
          
 Chemical Properties
 
  • Boiling Point: 4566C
  • Melting Point: 1221C


Cr - Chromium

 Chromium 
          
 Chemical Properties
 
  • Boiling Point: 4841C
  • Melting Point: 3465C


Mo - Molly

 Molybdenum
          
 Chemical Properties
 
  • Boiling Point: 8382C
  • Melting Point: 4753C


W - Tungsten

 Tungsten 
          
 Chemical Properties
 
  • Boiling Point: 10,030C
  • Melting Point: 6,191C


Semiconductors

Oxides

Al2O3 - Aluminum Oxide

 Aluminum Oxide
          


 Chemical Properties
 
  • Boiling Point: 5390C
  • Melting Point: 3760C


SiO2 - Silicon Oxide

 Silicon Dioxide
          


 Chemical Properties
 
  • Boiling Point: 4046C
  • Melting Point: 2912C


TiO2 - Titanium Oxide



 Titanium Dioxide
          


 Chemical Properties
 
  • Boiling Point: 5382C
  • Melting Point: 3349C


HfO2 - Hafnium Oxide


ZrO2 - Zirconium Oxide


ZnO - Zinc Oxide

 Zinc Oxide
          
 Chemical Properties
 
  • Boiling Point: 4280C
  • Melting Point: 3587C


MgO - Magnesium Oxide


 Magnesium Oxide
          
 Chemical Properties
 
  • Boiling Point: 4046C
  • Melting Point: 2912C


IGZO - Indium-Garllium-Zinc Oxide

ITO - Indium Tin Oxide


 Indium Tin Oxide
          
 Chemical Properties
 
  • Melting Point: 2200C


TEOS - Tetraethyl Orthosilicate

Nitrides

TiN - Titanium Nitride

SiN - Silicon Nitride

 Silicon Nitride
           
 Chemical Properties
 
 
  • Melting Point: 2912C


HfN - Hafnium Nitride

AlN - Aluminum Nitride

 Silicon Nitride
           
 Chemical Properties
 
 
  • Melting Point: 2912C