IMS- Micro/Nano Fabrication Facility
Processing (Older)
Research Capabilities

Backend Processing and Packaging

·       SCS Parylene Coater

·       ADT 7100 Dicing Saw

·       LapMaster (3)

·       Logitech LP50 Lapper

·       Logitech PM5 Polisher

·       AET RTP

·       SSI RTP

·       JetFirst RTP

·       Finetech Sub-Micron Flip-chip Bonder

·       Karl Suss SB6 Bonder

·       Karl Suss SB8E Bonder

Bio-Analysis

·       Contact Angle Measurement System

·       Biacore T200 SPR

·       Bioforce Nano eNabler Printer/Patterner

·       Malvern Zetasizer

·       MicroFab JetLab II Ink-jet Printer

·       Microfuge 18 Micro-centrifuge

·       Q-sense QCM-D

Etch

Chemical Etcher

·       Xactix Xenon Difluoride Etcher

·       AMMT Hydrofluoric (HF) Vapor Etcher

RIE

·       Advanced Vacuum Vision RIE (2)

·       Oxford End-point RIE

·       Plasma Therm RIE

·       Plasma Therm SLR RIE

·       Technics Micro RIE

·       Unaxis RIE

DRIE

·       Plasma Therm ICP (2)

·       STS AOE ICP

·       STS SOE ICP

DRIE-Bosch

·       STS HRM ICP

·       STS ICP

·       STS Pegasus ICP

Cleaner

·       Samco UV Ozone Dry Stripper

·       Plasma-Etcher Plasma Cleaner

·       YES-R1 Plasma Cleaner

·       Gasonics Asher (2)

Accessory

·       Tousimis Super Critical Dryer (2)

Furnaces and Diffusion

Oxidation

·       Tystar Nitride Furnace

·       Tystar Poly Furnace

·       Tystar Mini Tube (2)

·       Lindberg Furnace

·       MRL Furnace - Tube (2)

LPCVD

·       Tystar Mini Tube

·       Tystar Nitride Furnace

·       Tystar Poly Furnace (2)

·       CtrLayer SEF Sulfurization Furnace

·       CVD FirstNano Graphene Furnace (2)

·       CVD FirstNano SiGe Nanowire Furnace

Doping/Annealing

·       Tystar Nitride Furnace (2)

·       Tystar Poly Furnace

Sintering/Curing

·       Lindberg Furnace (3)

Lithography

Coater

·       BLE Spinner

·       EBL CEE Spinner

·       EVG 101 Spin Coater

·       Karl Suss RC8 Spinner (2)

·       Laurell Spinner

·       SCS G3P8 Spin Coater (6)

·       Suss AltaSpray Spray Coater

Mask Aligner

·       EVG 620 Mask Aligner

·       Karl Suss MA-6 Mask Aligner (3)

·       Karl Suss TSA MA-6 Mask Aligner

·       Suss Microtec MJB4

Pattern Generator

·       Microtech Laserwriter LW405

·       Heidelberg MLA 150 Mask Alinger

Other Lithography System

·       Obducat Nano-imprinter (NIL)

·       Nanoscribe 3D Lithography

·       JEOL JBX-9300FS EBL System

·       Elionix EBL 125kV System