Backend Processing and Packaging
· SCS Parylene Coater
· ADT 7100 Dicing Saw
· LapMaster (3)
· Logitech LP50 Lapper
· Logitech PM5 Polisher
· AET RTP
· SSI RTP
· JetFirst RTP
· Finetech Sub-Micron Flip-chip Bonder
· Karl Suss SB6 Bonder
· Karl Suss SB8E Bonder
Bio-Analysis
· Contact Angle Measurement System
· Biacore T200 SPR
· Bioforce Nano eNabler Printer/Patterner
· Malvern Zetasizer
· MicroFab JetLab II Ink-jet Printer
· Microfuge 18 Micro-centrifuge
· Q-sense QCM-D
Etch
Chemical Etcher
· Xactix Xenon Difluoride Etcher
· AMMT Hydrofluoric (HF) Vapor Etcher
RIE
· Advanced Vacuum Vision RIE (2)
· Oxford End-point RIE
· Plasma Therm RIE
· Plasma Therm SLR RIE
· Technics Micro RIE
· Unaxis RIE
DRIE
· Plasma Therm ICP (2)
· STS AOE ICP
· STS SOE ICP
DRIE-Bosch
· STS HRM ICP
· STS ICP
· STS Pegasus ICP
Cleaner
· Samco UV Ozone Dry Stripper
· Plasma-Etcher Plasma Cleaner
· YES-R1 Plasma Cleaner
· Gasonics Asher (2)
Accessory
· Tousimis Super Critical Dryer (2)
Furnaces and Diffusion
Oxidation
· Tystar Nitride Furnace
· Tystar Poly Furnace
· Tystar Mini Tube (2)
· Lindberg Furnace
· MRL Furnace - Tube (2)
LPCVD
· Tystar Mini Tube
· Tystar Nitride Furnace
· Tystar Poly Furnace (2)
· CtrLayer SEF Sulfurization Furnace
· CVD FirstNano Graphene Furnace (2)
· CVD FirstNano SiGe Nanowire Furnace
Doping/Annealing
· Tystar Nitride Furnace (2)
· Tystar Poly Furnace
Sintering/Curing
· Lindberg Furnace (3)
Lithography
Coater
· BLE Spinner
· EBL CEE Spinner
· EVG 101 Spin Coater
· Karl Suss RC8 Spinner (2)
· Laurell Spinner
· SCS G3P8 Spin Coater (6)
· Suss AltaSpray Spray Coater
Mask Aligner
· EVG 620 Mask Aligner
· Karl Suss MA-6 Mask Aligner (3)
· Karl Suss TSA MA-6 Mask Aligner
· Suss Microtec MJB4
Pattern Generator
· Microtech Laserwriter LW405
· Heidelberg MLA 150 Mask Alinger
Other Lithography System
· Obducat Nano-imprinter (NIL)
· Nanoscribe 3D Lithography
· JEOL JBX-9300FS EBL System
· Elionix EBL 125kV System