IMS- Micro/Nano Fabrication Facility
Processing (Older)
PVD75 Filament Evaporator

Location: Marcus Inorganic Cleanroom

Substrate Size: < 4" wafer

Number of Substrate Allowed: 1 – 3

Depositions Available: Al, Cr, Cu, Au, Fe, Ni, Pt, Ag, Sn, Ti

Special Features

 Use of boats/wires to melt materials