IMS- Micro/Nano Fabrication Facility
Processing (Older)
3. Standard Operation Procedure

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Mask Aligner
Metal Deposition
Mask Aligner
Photolithography Basics
PhotoResist
Substrate Clean

 

Contact Information
Hang Chen, Ph.D.
Process Support Manager
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332 | 1152
404.894.3360 | hang.chen@ien.gatech.edu