IMS - SUMS - Shared User Management System

1. Photolithography

The Georgia Tech cleanroom contain specialized equipment for photolithography-based research. The cleanroom contains aligners ( contact, mask ,and maskless) (Karl Suss, Heidelberg), spinners, photoresist tools, recipes, & spinners. Compatible with SU-8.

The Georgia Tech cleanroom contain RIE and ICP etching tools from Plasma Therm, Oxford Instruments, STS, SPTS, Advanced Vacuum, and Unaxis. Processes includes Bosch, silicon, MEMS, III-V, dielectric, silicon carbide, quartz.

The Georgia Tech cleanroom contain E-beam, filament, evaporator, PECVD, silicon dioxide, silicon nitride, a-Si, amorphous silicon, copper, platinum, gold, titanium, chromium, nickel, aluminum, ALD, aluminum oxide, hafnium

4. Micro-machining Laser Lab

The Georgia Tech Laser Lab contains Alabama UV, OPTEC Femtosecond, Resonetic IR, and Hermes CO2 Lasers which offer UV to near-IR laser cutting capabilities

5. High Temperature Solutions

The Georgia Tech cleanroom contains many different tools to manipulate your samples temperature, including High Temperature furnaces, High Temperature Vacuum Ovens, and RTPs.

6. Materials Growth

The Georgia Tech cleanroom contain materials growth tools from CVD First Nano, Tystar, MRL, Aixtron, Unaxis and STS. Process include annealing, oxidation, a-Si, amorphous silicon, TEOS, graphene, CNT, carbon nanotubes, N-Dopant, & P-Dopant.

The Georgia Tech cleanroom contain a variety of metrology tools including: profilometers, ellipsometers, stress measurement, SEM, scanning electron microscope, & other materials characterization tools

8. IEN - Biocleanroom

The Georgia Tech cleanroom contain research equipment focused towards Bio and soft materials. It also houses materials characterization equipment suitable for all facets of research.

The Georgia Tech cleanroom contain research tools geared towards the packaging of microelectronic systems.

E-beam Lithography

The Georgia Tech cleanroom contain a high resolution Electron Beam Lithography (EBL) systems. Click here to learn about the Elionix ultra-high resolution , ZEP, PMMA, nanolithography, structures.

Research Equipment

The Georgia Tech cleanroom contain a variety of research equipment. Click here for a complete list.