IMS- Micro/Nano Fabrication Facility
Processing (Older)
Laurel Spinner

Location: Marcus Inorganic Cleanroom

Substrate Size: small pieces - 4" wafer

Number of Substrates Allowed: 1

Special Features:

PZT and ferrorelectric spin coating;  

Contact Information
Hang Chen, Ph.D.
Process Support Manager
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332 | 1152
404.894.3360 | hang.chen@ien.gatech.edu