IEN - SUMS - Shared User Management System

Select Login Portal

IEN - Micro/Nano Fabrication Facility

Select Login Portal

1. New User Preparation

2. Processing Basics

3. Recipe Library

4. Processing Procedure

5. Process/Equipment Selection

6. Processing Materials

7. Equipment Baseline

8. Processing Safety

9. Request Help

A. System Contamination Control Policy

Georgia Institute of Technology
Shared User Management System
791 Atlantic Drive
Atlanta GA 30332-0269

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