IMS- Micro/Nano Fabrication Facility
Processing (Older)
1. Recipe Library

Etching

Lithography

High Temperature Process

Metrology

Packaging

Thin Film Deposition

Related Media
Contact Information
Hang Chen, Ph.D.
Process Support Manager
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332 | 1152
404.894.3360 | hang.chen@ien.gatech.edu