IMS- Micro/Nano Fabrication Facility
Processing (Older)
Wet Etching

CMOS Clean Station

CMOS Cleaning Station - Marcus

Location: Marcus Inorganic Cleanroom

Substrate Size: 4" and 6"

Heated Tanks: Piranha, SC1, SC2, Nitride

Special Features:

Wet Processing

 

 

 

 

 

CMOS Cleaning Station - Pettit

Location: Pettit Cleanroom

Substrate Size: 4" and 6"

Heated Tanks: Piranha, SC1, SC2, Nitride

Special Features:

Wet Processing;

 

 

 

 

 

 

MEMS Wetbench

Regular Fume hood