IMS- Micro/Nano Fabrication Facility
Processing
Tystar Mini 3 - TEOS Oxide

Equipment
          EquipmentTystar Mini 3

Manufacturer: Tystar Inc.

Model Mini

Tube Size up to 6 in




Recipe

Recipe Name:

TEOS Oxide


Gas  TEOS

TEOS Temperature35 - 50 C

Gas Flow Rate100 - 150 sccm

Pressure225 – 350 mTorr

Temperature625 – 725 C Gradient




Resultsa

Deposition Rate20 - 25 nm/min

Index of Refraction 1.41 – 1.46

Uniformity:< 5%b




a: Date provided by Tystar Inc.

b: Calculated using 1σ std. Deviation