IMS- Micro/Nano Fabrication Facility
Processing
Tystar Nitride 4 - Low Stress Nitride

Equipment
          EquipmentTystar Nitride Furnace 4

Manufacturer: Tystar Inc.

Model Nitride

Tube Size up to 6 in




Recipe

Recipe Name:

Low Stress Nitride


Gas  SiH2Cl2, NH3

Gas Ratio4:1 ~ 6:1

Pressure250 – 350 mTorr

Temperature800 – 840 C Gradient




Resultsa

Index of Refraction 2.00 – 2.30

Uniformity:< 5%  (using 1σ std. Deviation)

Residual Stress50 – 300 Mpab




a: Date provided by Tystar Inc.

b: Gas Ratio Dependant