IMS- Micro/Nano Fabrication Facility
Processing
Tystar Nitride Furnace 4 - Nitride

Equipment
          EquipmentTystar Nitride Furnace 4

Manufacturer: Tystar Inc.

Model Nitride

Tube Size up to 6 in




Recipe

Recipe Name:

Silicon Nitride


Gas  SiH2Cl2, NH3

Gas Ratio3:1

Gas Flow RateNH3: 120 - 150 sccm


SiH2Cl2: 40 - 50 sccm

Pressure250 – 350 mTorr

Temperature800 – 830 C Gradient




Resultsa

Index of Refraction 1.98 – 2.10

Uniformity:< 3%  (using 1σ std. Deviation)

Residual Stress1000 – 1250 Mpa




a: Data Provided by Tystar Inc.