IMS- Micro/Nano Fabrication Facility
Processing
Titanium Etchant TFT
 Titanium Etchant TFT

 Designed for etching evaporated films commonly employed as bonding and barrier layers
 Chemical Properties
 
  • Excellent resolution and photoresist compatibility
  • Clear, aqueous solution
  • Non-flammable
  • Compatible with both positive and negative photoresists