IMS- Micro/Nano Fabrication Facility
Processing
Tystar Nitride Furnace 3 - Dry Oxidation

Equipment
          Equipment Tystar Nitride Furnace 3

Manufacturer: Tystar Inc.

Model Nitride

Tube Size Up to 6 in wafer




Recipe

Recipe Name:

Dry Oxidation


Gas  O2 (Pyrogenic only)

Gas Flow Rate~ 3 slpm

PressureAtmosphere

Temperature800 – 1250




Resultsa

Index of Refraction 1.45 – 1.47

Uniformity:

100 - 500 Angstroms < 5%  (using 1σ std. Deviation)


Uniformity:


>500 Angstroms         < 3%