IMS- Micro/Nano Fabrication Facility
Processing
Tystar Nitride Furnace 3 - Wet Oxidation

Equipment
          Equipment Tystar Nitride Furnace 3

Manufacturer: Tystar Inc.

Model Nitride

Tube Size Up to 6 in wafer




Recipe

Recipe Name:

Wet Oxidation


Gas  H2/O2 (Pyrogenic only)

DI H2O Steam

PressureAtmosphere

Temperature800 – 1250




Resultsa

Index of Refraction 1.45 – 1.4

Uniformity:<2000 Angstroms < 3%  (using 1σ std. Deviation)

Uniformity:

>2000 Angstroms < 2%  (using 1σ std. Deviation)





a: All data is updated as the date indicated above