Silicon KOH Etching -

Silicon KOH Etching

50% KOH Etching of Silicon 100^a

50% KOH Etching of Silicon 110^a

a: Cited from www.cheanroom.byu.edu

Contact Information

Hang Chen, Ph.D.
Process Support Manager
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332 | 1152
404.894.3360 | hang.chen@ien.gatech.edu