IMS- Micro/Nano Fabrication Facility
Processing
Gasonics Asher

The Aura 1000 Asher is a microprocessor controlled downstream photoresist stripper that will strip the front and backside of a wafer, typically in less than one minute. It is also able to function as a descummer by removing approximately 200-500 angstroms; Etch Photoresist, Descum; max 4" samples


 

Related Links
IEN Training Video
Contact Information
Hang Chen, Ph.D.
Process Support Manager
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332 | 1152
404.894.3360 | hang.chen@ien.gatech.edu