Safety Do's -

Safety

1. Recipe Library

2. Fabrication Fundamentals

3. Equipment Selection

3. IEN Process Search

3. Standard Operation Procedure

Cambridge NanoTech ALD (left)

Cambridge NanoTech Plasma ALD - Right (non-metal)

Characterization based on Industry Standards

Chemical Dry Etch

Chemical Vapor Deposition (CVD)

Chemicals Inventory

Denton Infinity

Developers Provided

Electroless Plating

Flipchip Bonding

Chemicals, Gasses & Precursors

Cleanup Procedures

Glove Selection Chart

Policy Violations

Label Chemicals With Official Labels

Provide Safety Data Sheets (SDS) for All Chemicals

Put All Sharps in the Proper Sharps Container

Put All Solvent Waste in the Designated Waste Bin

Store Solvents and Polymers in the Proper Cabinet

Understand Possible Reactions When Mixing Chemicals

Wear Proper Gloves When Handling Chemicals

Georgia Valve and Fitting

Incident Report

Instructional Lab Tools

K&S 4522 - Au Ball Bonding

K&S 4523A - Al Wedge Bonding

Karl Suss RC8 Spinner - Marcus

Karl Suss RC8 Spinner - Pettit

Laser MicroMachining Technologies

Metal Deposition

New Laser Proposal

Other Developers

Oxford ICP PECVD - Oxide

Oxford PECVD Left - Amorphous Silicon

Oxford PECVD Left - Carbide

Oxford PECVD Right - Oxide

Oxford PECVD Right - Standard Nitride Recipe

Plasma Therm PECVD - Standard Nitride Recipe

Plasma Therm PECVD - Standard Oxide Recipe

Plasma Therm SLR RIE

Polisher / Lapper

Polisher/Lapper

Polymer Curing/Sintering

Processing Help

PVD75 Filament Evaporator

Radiation Safety

Rapid Thermal Process

Remote Processing

Research Capabilities

SCS Spincoater Processing Tab

Silicon Dioxide Etching

Silicon Nitride Etching

STS PECVD 2 - Oxide

Suess AltaSpray Coater

Thermo Oxidation

Thin Film Materials

Titanium Etching

Tystar Poly Furnace 3

Wet Bench Chemicals

Safety Do's