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Safety
1. Recipe Library
2. Fabrication Fundamentals
3. Equipment Selection
3. IEN Process Search
3. Standard Operation Procedure
About Staff
Al Etching
Annealing
Au Etching
BLE Spinner
Cambridge NanoTech ALD (left)
Cambridge NanoTech Plasma ALD - Right (non-metal)
Characterization based on Industry Standards
Chemical Dry Etch
Chemical Vapor Deposition (CVD)
Chemicals Inventory
Cr Etching
Cu Etching
Denton Infinity
Developers Provided
Development
Dicing
Direct Write
Dry Etching
Electroless Plating
Electroplating
Flipchip Bonding
General Safety
Chemicals, Gasses & Precursors
Cleanup Procedures
Glove Selection Chart
Policy Violations
Allowing an Unauthorized User to Run Equipment
Failure to Log In
Failure To Log Out
Granting Access to an Unauthorized User
Leaving Chemicals Without Proper Documentation
Logged Into Equipment More than the Allotted Time
Not Relabeling Properly Each Quarter
Not Showing Up For Cleanup
Not Wearing Proper Safety Equipment at the Fume Hood
Reserving Equipment in the Scheduler But Not Using the Equipment
Unauthorized use of any cleanroom equipment
Using Equipment Reserved for Another User
Using Equipment Undergoing Maintenance or Marked Down
Using Equipment With Someone Else's Buzzcard
Safety Don'ts
Safety Do's
Georgia Valve and Fitting
Incident Report
Instructional Lab Tools
K&S 4522 - Au Ball Bonding
K&S 4523A - Al Wedge Bonding
Karl Suss RC8 Spinner - Marcus
Karl Suss RC8 Spinner - Pettit
Laser MicroMachining Technologies
Laurel Spinner
LPCVD
Materials
Materials
Metal Deposition
Metal Etchants
New Laser Proposal
Other Developers
Oxford ICP PECVD - Oxide
Oxford PECVD
Oxford PECVD Left - Amorphous Silicon
Oxford PECVD Left - Carbide
Oxford PECVD Right - Oxide
Oxford PECVD Right - Standard Nitride Recipe
P / N Doping
Parker
Parylene
Plasma Etching
Plasma Therm PECVD - Standard Nitride Recipe
Plasma Therm PECVD - Standard Oxide Recipe
Plasma Therm SLR RIE
Polisher / Lapper
Polisher/Lapper
Polymer
Polymer Curing/Sintering
Polysilicon
Process Flow
Process Flow
Processing Help
PVD75 Filament Evaporator
Radiation Safety
Rapid Thermal Process
Recipe Library
Remote Processing
Research Capabilities
Resists
SCS Spincoater Processing Tab
SDS Database
Semiconductor
Silicon Dioxide Etching
Silicon Nitride Etching
STS AOE ICP
STS PECVD 2
STS PECVD 2 - Oxide
Suess AltaSpray Coater
Thermo Oxidation
Thin Film Materials
Titanium Etching
Tool Selection
Tutorials
Tystar Poly Furnace 3
Unaxis PECVD
Vision RIE 1
Wet Bench Chemicals
Wet Etching
Wire Bonding
XeF2 Etching
Policy Violations
Policy Violations
Unlawful use of any cleanroom equipment without being an authorized user for the equipment
Granting access to an unauthorized user to use equipment
Using equipment with someone else's buzzcard without being an authorized user and/or not under supervision
Allowing an authorized/unauthorized user to run equipment under your name (ie.using your buzzcard), but without supervision
Using equipment reserved for another user
Using equipment when it is undergoing maintenance and is marked not to be used or "Machine Down"
Reserving equipment in the Scheduler, but not using the equipment for the time scheduled
Being logged in equipment for longer than the equipment time limit
Failure to log in at the computer in the gowning room or not reporting in the logbook
Failure to log out from the computer in the gowning room or not reporting in the logbook
Not re-labeling properly with the correct color label every billing quarter
Leaving chemicals without proper documentation in Chemical Safety Warning Sheets
Not wearing proper safety equipment at the fume-hood
Not showing up for cleanup
Unauthorized entry into the cleanroom.
Allowing another user to make an unauthorized entrance into the cleanroom.
Leaving toteboxes unattended
Damage to equipment
Not following proper gowning and degowning procedures
Removing supplies/equipment from the cleanroom
Changing equipment settings
Improper usage of safety apparel
Related Links
Georgia Tech Environmental Health & Safety
Georgia Tech Office of Radiological Safety
Nanotech Consensus Workplace Safety Guidelines
National Institute for Occupational Safety and Hea
USystem of Georgia Right-to-Know Trainin
Related Media
Chemical Warning Form
Cleanroom Manual
Cleanroom Safety Presentation
How to Translate an MSDS
Optical Characterization by Spectroscopic Ellipsom
Organic Cleanroom Manual
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