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Al Etching
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BLE Spinner
Cambridge NanoTech ALD (left)
Cambridge NanoTech Plasma ALD - Right (non-metal)
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Oxford PECVD Right - Standard Nitride Recipe
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Hydrochloric Acid
Concentration
Density
Molarity
pH
Viscosity
Specific
heat
Vapour
pressure
Boiling
point
Melting
point
kg HCl/kg
kg HCl/m
3
Baumé
kg/L
mol/dm
3
mPa·s
kJ/(kg·K)
kPa
°C
°C
10%
104.80
6.6
1.048
2.87
−0.5
1.16
3.47
1.95
103
−18
20%
219.60
13
1.098
6.02
−0.8
1.37
2.99
1.40
108
−59
30%
344.70
19
1.149
9.45
−1.0
1.70
2.60
2.13
90
−52
32%
370.88
20
1.159
10.17
−1.0
1.80
2.55
3.73
84
−43
34%
397.46
21
1.169
10.90
−1.0
1.90
2.50
7.24
71
−36
36%
424.44
22
1.179
11.64
−1.1
1.99
2.46
14.5
61
−30
38%
451.82
23
1.189
12.39
−1.1
2.10
2.43
28.3
48
−26
The reference temperature and
pressure
for the above table are 20 °C and 1 atmosphere (101.325 kPa).
Vapour pressure values are taken from the
International Critical Tables
, and refer to the total vapour pressure of the solution.
Source: Wikipedia.com
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