IMS- Micro/Nano Fabrication Facility
Processing
AZ P4000 Series

AZ p4620

The AZ P4000 positive resist series with its members AZ P4110, AZ P4330, AZ P4620 and AZ P4903 have two main characteristics:

  • An improved adhesion to all common substrates for a higher stability for e. g. wet etching or plating
  • A lower photo active compound concentration which allows the application of thick and very thick resist films (approx. 3 - 30 µm) 

 

Other characteristics:

AZ P4110

  • Resist film thickness range: Approx. 2 - 5 µm
  • Sales units: gallons (small sales volumes such as 250 ml, 500 ml or 1000 ml on request)

 

AZ P4330

  • Resist film thickness range: Approx. 3 - 8 µm
  • Sales units: gallons (small sales volumes such as 250 ml, 500 ml or 1000 ml on request)

 

AZ P4620

  • Resist fim thickness range: Approx. 6 - 20 µm
  • Sales units: 250 ml, 500 ml or 1000 ml, gallons (3.78 L)

 

AZ P4903

  • Resist film thickness range: Approx. 8 - 30 µm
  • Sales units: gallons (small sales volumes such as 250 ml, 500 ml or 1000 ml on request)

 

Development

AZ® 400K 1 : 4 or AZ® 826 MIF recommended