IMS- Micro/Nano Fabrication Facility
Processing
Tystar Nitride Furnace 1 - N Doping

Equipment
          Equipment Tystar Nitride Furnace 1

Manufacturer: Tystar Inc.

Model Nitride

Tube Size Up to 6 in wafer




Recipe

Recipe Name:

NDOPECOMM


Doping Source

Phosphorus


Gas  N2 1000 sccm

PressureAtmosphere

Temperature800 – 1250




Resultsa

Sheet Resistivity 

Uniformity: