IMS- Micro/Nano Fabrication Facility
Lindberg Furnace 3 (Oxidation Tube)
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Equipment Description

The Georgia Tech Lindberg furnace tube 3 is used for curing polymers, sintering, and wet/dry oxidation and nitrides on silicon wafers. *Max temperature: 1100C *Oxygen

Institute Georgia Tech
Department IMS- Micro/Nano Fabrication Facility
Sub Tool Of
 Pettit Cleanroom
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Georgia Institute of Technology
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791 Atlantic Drive
Atlanta GA 30332-0269 
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