IEN - Micro/Nano Fabrication Facility
Lindberg Furnace 3 (Oxidation Tube)
Information
Schedule
Training
Equipment Description

The Georgia Tech Lindberg furnace tube 3 is used for curing polymers, sintering, and wet/dry oxidation and nitrides on silicon wafers. *Max temperature: 1100C *Oxygen

Institute Georgia Tech
Department IEN - Micro/Nano Fabrication Facility
Sub Tool Of
 Pettit Cleanroom
Related Links
Related Media

Contact Information
Georgia Institute of Technology
Shared User Management System
791 Atlantic Drive
Atlanta GA 30332-0269 
© Georgia Institute of Technology