IMS- Micro/Nano Fabrication Facility
Tystar Nitride Furnace 2
Information
Schedule
Training
Equipment Description

The Georgia Tech Tystar Nitride Furnace 2 is used for P-type doping, polysilicon doping (P-type) with solid source (BoronPlus) sources. Common recipes: PDOPCOMM.002 at 1050C PANNEAL.002

Institute Georgia Tech
Department IMS- Micro/Nano Fabrication Facility
Sub Tool Of
 Pettit Cleanroom
Related Links
Contact Information
Georgia Institute of Technology
Shared User Management System
791 Atlantic Drive
Atlanta GA 30332-0269 
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