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Research Capabilities
1. Photolithography
2. Etching
3. Thin Films
4. Micro-machining Laser Lab
Alabama UV Laser
Hermes LS500XL CO2 Laser
OPTEC #1 Femtosecond Laser
Optec #2 Femtosecond Laser
Optomec Aerosol Jet 200
Resonetics IR Laser
SCS Parylene Coater
5. High Temperature Solutions
6. Materials Growth
7. Metrology
8. IEN - Biocleanroom
9. Packaging
E-beam Lithography
Research Equipment
4. Micro-machining Laser Lab
Alabama UV Laser
OPTEC #1 Femtosecond Laser
Optec #2 Femtosecond Laser
SCS Parylene Coater
Optomec Aerosol Jet 200
Contact Information
Yandong (Henry) Su, PhD
Senior Research Engineer
Pettit Microelectronic Building
791 Atlanta Dr. Atlanta, GA 30332
yandong.su@gatech.edu
470-757-3195
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