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IMS- Micro/Nano Fabrication Facility
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Research Capabilities
1. Photolithography
2. Etching
3. Thin Films
4. Micro-machining Laser Lab
5. High Temperature Solutions
5.1 High Temperature Vacuum Oven and RTA
AET RTP
Heraeus Vacuum Oven 1 (Top)
Heraeus Vacuum Oven 2 (Bottom)
JetFirst RTP
SSI RTP
5.2 Thermal Processing
6. Materials Growth
7. Metrology
8. IEN - Biocleanroom
9. Packaging
E-beam Lithography
Research Equipment
5.1 High Temperature Vacuum Oven and RTA
AET RTP
Rapid Thermal Process
SSI RTP
Rapid Thermal Process
Heraeus Vacuum Oven
Vacuum Oven
JetFirst RTP
Rapid Thermal Process
Contact Information
For process support please click below
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