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Research Capabilities
1. Photolithography
2. Etching
3. Thin Films
4. Micro-machining Laser Lab
5. High Temperature Solutions
5.1 High Temperature Vacuum Oven and RTA
5.2 Thermal Processing
Lindberg Furnace 1 (CMOS Sintering Tube)
Lindberg Furnace 2 (Polymer Curing Tube)
Lindberg Furnace 3 (Oxidation Tube)
Lindberg Furnace 4 (Polymer Curing Tube)
Mini Tystar Tube 1
Mini Tystar Tube 2
Mini Tystar Tube 3
MRL Furnace - Tube 3
MRL Furnace - Tube 4
Schmid APCVD
Tystar Nitride Furnace 1
Tystar Nitride Furnace 2
Tystar Nitride Furnace 3
Tystar Nitride Furnace 4
Tystar Poly Furnace 1
Tystar Poly Furnace 2
Tystar Poly Furnace 3
Tystar Poly Furnace 4
6. Materials Growth
7. Metrology
8. IEN - Biocleanroom
9. Packaging
E-beam Lithography
Research Equipment
Tystar Poly Furnace 2
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Information
Schedule
Training
Equipment Description
The Georgia Tech Tystar Poly Furnace 2 is used for Kooi, P-well drive, and dry, and wet oxidation.
Institute
Georgia Tech
Department
IEN - Micro/Nano Fabrication Facility
Sub Tool Of
Pettit Cleanroom
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