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IMS- Micro/Nano Fabrication Facility
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Research Capabilities
1. Photolithography
2. Etching
3. Thin Films
4. Micro-machining Laser Lab
5. High Temperature Solutions
5.1 High Temperature Vacuum Oven and RTA
5.2 Thermal Processing
6. Materials Growth
7. Metrology
8. IEN - Biocleanroom
9. Packaging
E-beam Lithography
Research Equipment
5. High Temperature Solutions
High Temperature Furnace
High Temperature Vacuum Oven and RTA
Contact Information
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