IMS- Micro/Nano Fabrication Facility
Lindberg Furnace 1 (CMOS Sintering Tube)
Information
Schedule
Training
Equipment Description

The Georgia Tech Lindberg furnace tube 1 is used for curing polymers, sintering, and growing oxides and nitrides on silicon wafers. *Max temperature: 1100C *Nitrogen *Forming Gas (10% H2 in Nitrogen)

Institute Georgia Tech
Department IMS- Micro/Nano Fabrication Facility
Sub Tool Of
 Pettit Cleanroom
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Contact Information
Georgia Institute of Technology
Shared User Management System
791 Atlantic Drive
Atlanta GA 30332-0269 
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