IEN - Micro/Nano Fabrication Facility
MRL Furnace - Tube 3
Information
Schedule
Training
Equipment Description

The Georgia Tech MRL Furnace 2 is used for dry oxidation at temperatures between 700 -1150°C. Batches of up to 50 wafers (4 to 6”) can be processed with excellent uniformity (less than 1%).

Institute Georgia Tech
Department IEN - Micro/Nano Fabrication Facility
Sub Tool Of
 Marcus Inorganic Cleanroom
Related Links
Contact Information
Georgia Institute of Technology
Shared User Management System
791 Atlantic Drive
Atlanta GA 30332-0269 
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