IEN - Micro/Nano Fabrication Facility
Tystar Nitride Furnace 1
Information
Schedule
Training
Equipment Description

The Georgia Tech Tystar Nitride Furnace 1 is used for N-type doping, Polysilicon doping (N-type) with solid (PhosPlus) sources. Common recipes: NDOPCOMM.001 at 1050C NANNEAL.001

Institute Georgia Tech
Department IEN - Micro/Nano Fabrication Facility
Sub Tool Of
 Pettit Cleanroom
Related Links
Contact Information
Georgia Institute of Technology
Shared User Management System
791 Atlantic Drive
Atlanta GA 30332-0269 
© Georgia Institute of Technology