Backend Processing and Packaging

• SCS Parylene Coater
• ADT 7100 Dicing Saw
• LapMaster (3)
• Logitech LP50 Lapper
• Logitech PM5 Polisher
• AET RTP
• SSI RTP
• JetFirst RTP
• Finetech Sub-Micron Flip-chip Bonder
• Karl Suss SB6 Bonder
• Karl Suss SB8E Bonder

Bio-Analysis

• Contact Angle Measurement System
• Biacore T200 SPR
• Bioforce Nano eNabler Printer/Patterner
• Malvern Zetasizer
• MicroFab JetLab II Ink-jet Printer
• Microfuge 18 Micro-centrifuge
• Q-sense QCM-D

Etch

Chemical Etcher

• Xactix Xenon Difluoride Etcher
• AMMT Hydrofluoric (HF) Vapor Etcher

RIE

• Advanced Vacuum Vision RIE (2)
• Oxford End-point RIE
• Plasma Therm RIE
• Plasma Therm SLR RIE
• Technics Micro RIE
• Unaxis RIE

DRIE

• Plasma Therm ICP (2)
• STS SOE ICP

DRIE-Bosch

• STS HRM ICP
• STS ICP
• STS Pegasus ICP

Cleaner

• Samco UV Ozone Dry Stripper
• Plasma-Etcher Plasma Cleaner
• YES-R1 Plasma Cleaner

Accessory

• Super Critical Dryer (2)

Furnaces and Diffusion

Oxidation

• Tystar Nitride Furnace
• Tystar Poly Furnace
• Tystar Mini Tube (2)
• Lindberg Furnace
• MRL Furnace - Tube (2)

LPCVD

• Tystar Mini Tube
• Tystar Nitride Furnace
• Tystar Poly Furnace (2)
• CtrLayer SEF Sulfurization Furnace
• CVD FirstNano Graphene Furnace (2)
• CVD FirstNano SiGe Nanowire Furnace

Doping/Annealing

• Tystar Nitride Furnace (2)
• Tystar Poly Furnace

Sintering/Curing

• Lindberg Furnace (3)

Lithography

Coater

• Osiris Spin Coater
• Karl Suss RC8 Spinner (2)
• Laurell Spinner
• SCS G3P8 Spin Coater (6)
• Suss AltaSpray Spray Coater

Mask Aligner

• EVG 620 Mask Aligner
• Karl Suss MA-6 Mask Aligner (3)
• Karl Suss TSA MA-6 Mask Aligner
• Suss Microtec MJB4

Pattern Generator

• Microtech Laserwriter LW405
• Heidelberg MLA 150 (2)
• Heidelberg MLA 300

Other Lithography System

• Obducat Nano-imprinter (NIL)
• Nanoscribe 3D Lithography
• JEOL JBX-9300FS EBL System
• Elionix EBL 125kV System

Accessory

• Thermo Scientific Precision Oven
• Heraeus Vacuum Oven (2)
• VWR Oven (2)
• SWC 3000-C Mask Cleaner
• Ultratech Plate Cleaner

Metrology and Characterization

Imaging

• Microscope (16)
• IR Microscope
• AMSCOPE IN300TB Inverted Microscope
• Olympus LEXT 3D Material Confocal Microscope
• Wafer Inspection Camera
• FEI Quanta 200 3D FIB/SEM
• Hitachi S-3500H SEM
• Hitachi S-3700N VP-SEM
• Hitachi S-4700 FE-SEM
• LEO 1530 FE-SEM
• Dage X-Ray XD7600NT

Ellipsometer/Reflectometer

• Woollam Ellipsometer (2)
• Woollam M2000 Ellipsometer
• Woollam Vase Ellipsometer
• Nanospec Reflectometer (2)

Profilometer

• Dektak 150 Profilometer (2)
• Tencor P15 Profilometer (3)
• Wyko NT2000 Profilometer (3)
• Wyko Profilometer NT3300

Spectrometer

• Semprex Spectrometer
• Thermo Scientific iS50 FT-IR Spectrometer
• Thermo UV-VIS Spectrometer
• UV-VIS Spectrophotometer

Misc.

• KLA Tencor Surfscan 6100
• SemiTest SCA-2500 Surface Charge Analyzer
• Bowoptic Stress Measurement
• Signatone Four-point Probe
• Signatone Probe Station
• Veeco Four-point Probe
• Q600 TGA/DSC

Micromachining

• MakerBot Replicator 3D Printer
• Hermes LS500XL CO2 Laser
• Resonetics IR laser

Thin Film Deposition

ALD

• Cambridge NanoTech Plasma ALD - Metal
• Cambridge NanoTech Plasma ALD - Oxide
• CtrLayer ALD (2)

CVD

• Schmid APCVD
• Surrey CNT NanoGrowth
• Aixtron Black Magic PECVD
• Oxford ICP-PECVD
• STS PECVD (2)
• Unaxis PECVD

Plating

• Plating Station (4)

Evaporator

• CHA E-beam Evaporator (2)
• CtrLayer Anti-Reflective Coater
• CVC E-Beam Evaporator (2)
• Denton Explorer - E-beam Evaporator
• Denton Infinity - E-beam/Filament Evaporator
• Lesker E-beam Evaporator
• PVD Filament Evaporator
• PVD75 Filament Evaporator

Sputterer

• CtrLayer SDS - Sputterer Deposition Systems
• CVC DC Sputterer
• Denton Discovery - RF/DC Sputterer (2)
• Hummer 5 Gold/Palladium Sputterer
• Hummer XP Gold Sputterer
• PVD75 RF Sputterer
• Unifilm Sputterer

Wet Process

• CMOS Cleaning Station (2)
• MEMS Wet Bench
• Fumehood (3)
• Solvent Fumehood
• CMOS Spin Rinse Dryer (2)
• MEMS Spin Rinse Dryer (SRD)
• Semitool Spin Rinse Dryer
• Verteq Spin Rinse Dryer (2)