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IMS- Micro/Nano Fabrication Facility
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Research Capabilities
1. Photolithography
1.1 Photo Resist Coaters
1.2 Optical Lithography
1.3 Direct Writing
2. Etching
3. Thin Films
4. Micro-machining Laser Lab
5. High Temperature Solutions
6. Materials Growth
7. Metrology
8. IEN - Biocleanroom
9. Packaging
E-beam Lithography
Research Equipment
1. Photolithography
Photo Resist Coaters
Optical Lithography
Direct Writing
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