6. Materials Growth - The Georgia Tech cleanroom contain materials growth tools from CVD First Nano, Tystar, MRL, Aixtron, Unaxis and STS. Process include annealing, oxidation, a-Si, amorphous silicon, TEOS, graphene, CNT, carbon nanotubes, N-Dopant, & P-Dopant.

6. Materials Growth

CVD First Nano SiGe Growth SiGe nanowire growth	CVD Sulfurization Growth Sulfur vapor oxidation process

CVD Carbon Nano Tube Growth CNT plasma growth	CVD First Nano Graphene Growth High temperature annealing