Technics Micro RIE -- Pettit Cleanroom
Information
Schedule
Training
The Georiga Tech Technics Micro RIE -- Pettit Cleanroom.
Functions
- Simple descum and surface activation
- Low entry cost
Materials etched
Gases
Substrate
- small pieces - 100mm wafer
| Institute |
Georgia Tech |
| Department |
IMS- Micro/Nano Fabrication Facility |
Sub Tool Of  |
Pettit Cleanroom |
|
|
| Applications |
Can be used to Etch:
-Silicon Dioxide
-Silicon Nitride
-Silicon
-Aluminum and Alloys
-Regractory Metal Silicides
-Chrome
-Gallium Arsenide and Alloys
-Indium Tin Oxide
-Polyamides
-Photoresist |
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