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IMS- Micro/Nano Fabrication Facility
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Research Capabilities
1. Photolithography
2. Etching
2.1 HF Vapor Etching
2.2 ICP Equipment
2.3 Plasma Cleaning
2.4 RIE Equipment
Oxford Endpoint RIE
Plasma Therm RIE
Plasma Therm SLR RIE
Technics Micro RIE -- Pettit Cleanroom
Unaxis RIE
Vision RIE 1
Vision RIE 2
2.5 DRIE/ICP Etching Capabilities
3. Thin Films
4. Micro-machining Laser Lab
5. High Temperature Solutions
6. Materials Growth
7. Metrology
8. IEN - Biocleanroom
9. Packaging
E-beam Lithography
Research Equipment
Plasma Therm SLR RIE
Related Links
Equipment Page
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