IMS- Micro/Nano Fabrication Facility
3.5 E-Beam

 

Denton Explorer - E-beam Evaporator

E-beam evaporator for metals, Dielectric

CHA E-beam Evaporator 1 (dielectrics)

E-beam evaporator for Dielectric only

CHA E-beam Evaporator 2 (metals)

E-beam evaporator for metals only

Denton Infinity E-beam

E-beam evaporator for metals only, co-evaporation