The Georgia Tech Denton Explorer is a six pocket e-beam evaporator system used to coat samples with various metals and dielectrics. A high-intensity beam of electrons is focused on the center of a crucible containing the material to be evaporated.

Function

• E-beam Evaporator

Materials Deposited

• Ti, Cr, Ni, Fe, Al, Cu, Au, Pt, Al203, SiO2, Ag, Mo

Component Specifications

• Three 4” wafer sample holders
• Six pocket 7cc crucible selector

Gases

• Ar

Substrate Size

• Up to 4” wafers

Process Pressure

• 5x10-6Torr to 5x10-7

Temperature

• Heater can reach up to 200C

Vendor Specified Capabilities

• Ion Assisted Deposition
• Crystal Monitor deposition control
• Sample flipping feature to double the number of samples that can be coated.