IMS- Micro/Nano Fabrication Facility
CVC E-Beam Evaporator 2 -- Instructional Center
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Schedule
Training
Equipment Description

The Georgia Tech e-beam evaporator is used to coat samples with various metals. Unlike sputtered films, evaporators only coat the surface facing away from the substrate. -Typical deposition rates range from <1 angstroms/sec to 3 angstroms/sec.

Institute Georgia Tech
Department IMS- Micro/Nano Fabrication Facility
Sub Tool Of
Pettit Cleanroom
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