IMS- Micro/Nano Fabrication Facility
3.3 Sputterer

 

AJA Nitride Sputterer

Nitrides reactive sputtering

Denton Discovery - RF/DC Sputterer

RF/DC sputtering for metals, dielectric

Denton Discovery 2 - RF/DC Sputterer

Li containing material sputtering

Unifilm Sputterer

Megatron sputtering for metals