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IMS- Micro/Nano Fabrication Facility
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Research Capabilities
1. Photolithography
2. Etching
3. Thin Films
3.1 PECVD
Black Magic PECVD
Oxford ICP-PECVD
STS PECVD 3
Unaxis PECVD
3.2 ALD
3.3 Sputterer
3.4 Filament Evaporator
3.5 E-Beam
SCS Parylene Coater
4. Micro-machining Laser Lab
5. High Temperature Solutions
6. Materials Growth
7. Metrology
8. IEN - Biocleanroom
9. Packaging
E-beam Lithography
Research Equipment
3.1 PECVD
Unaxis PECVD
SiO2/SiN PECVD
Black Magic PECVD
CNT plasma growth
STS PECVD
SiO2/SiN PECVD
Oxford ICP-PECVD
SiO2/SiN PECVD
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