IMS- Micro/Nano Fabrication Facility
3.2 ALD

 

ALD2

Aluminum Oxide

 

Cambridge NanoTech Plasma ALD - Metal (Left)

Thermal/Plasma ALD dielectric/metal deposition

 

Cambridge NanoTech Plasma ALD - Oxide (Right)

Thermal/Plasma ALD dielectric deposition

 

Veeco ALD

Thermal/Plasma ALD dielectric deposition