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Research Capabilities
1. Photolithography
2. Etching
3. Thin Films
3.1 PECVD
3.2 ALD
ALD2
Cambridge NanoTech Plasma ALD - Metal (left)
Cambridge NanoTech Plasma ALD - Oxide (right)
Veeco ALD
3.3 Sputterer
3.4 Filament Evaporator
3.5 E-Beam
SCS Parylene Coater
4. Micro-machining Laser Lab
5. High Temperature Solutions
6. Materials Growth
7. Metrology
8. IEN - Biocleanroom
9. Packaging
E-beam Lithography
Research Equipment
Veeco ALD
Information
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Equipment Description
The Georgia Tech Veeco ALD.
Institute
Georgia Tech
Department
IEN - Micro/Nano Fabrication Facility
Sub Tool Of
Marcus Inorganic Cleanroom
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