IEN - Micro/Nano Fabrication Facility
Denton Discovery 2 RF/DC Sputterer
Information
Schedule
Training
Equipment Description

The Georgia Tech Denton Discovery 2 is an RF/DC sputterer capable of high temperature processing and RF bias on the platen. It currently has 4 guns, 3 of which are RF and 1 DC. Specifications: -turbo and cryo pumped (5e-6 Torr) -sample heater 600C max

Institute Georgia Tech
Department IEN - Micro/Nano Fabrication Facility
Sub Tool Of
 Marcus Inorganic Cleanroom
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Contact Information
Georgia Institute of Technology
Shared User Management System
791 Atlantic Drive
Atlanta GA 30332-0269 
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