This section contains the standard recipes for the equipment that is maintained by the IEN cleanroom staff. This information should be used as a reference to design process flows and get started working with the equipment. Users are strongly encouraged to verify these measurements on their own, prior to any device run.

• Photolithography Resists and Exposure
• CVD Recipes
• PVD Recipes
  • Metal Deposition
  • Dielectric Deposition
• ALD Recipes
• Plasma Etch Recipes
  • Dielectric Etching
  • Si/SOI Etching
  • Metal Etching
  • III-V Etch


• Thermal Growth/Furnaces
• Descum