IEN - Micro/Nano Fabrication Facility
3. Recipe Library

This section contains the standard recipes for the equipment that is maintained by the IEN cleanroom staff. This information should be used as a reference to design process flows and get started working with the equipment. Users are strongly encouraged to verify these measurements on their own, prior to any device run.

Contact Information
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332

For process support please click below