IEN- Micro/Nano Fabrication Facility
3.5 Plasma Etch Recipes

This section contains the recipes used for plasma etching various materials in the IEN cleanroom. The recipes have been divided into various material classes. The material classes found in this recipe database include dielectrics, silicon, III-Vs, metals, etc. The recipes can be found using the links below.

Contact Information
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332

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