IEN - Micro/Nano Fabrication Facility
5. Process/Equipment Selection

This section provides users with guidance on how to select the proper process or the proper piece of equipment for their application. In the process selection section, benefits and limitations to different processing approaches are discussed. In the equipment selection section, the capabilities and configurations of different tools are outlined so users can choose the tool that best meets the needs of their process flow. Please select the information of interest from the links below.

Contact Information
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332

For process support please click below