This section contains the standard Platinum Etch and Chromium Etch recipes for all GT ICP equipment.

Platinum Etch

• Instrument: Plasma Therm ICP (Left Chamber)
• Location: Pettit Cleanroom
• Sample size:
  • Pieces to 4” wafer. Pieces have to be placed on a four inch Si wafer with cool grease, or with a kapton tape.
• Standard Recipes:

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Chromium Etch

• Instrument: Plasma Therm ICP (Left Chamber)
• Location: Pettit Cleanroom
• Sample size:
  • Pieces to 4” wafer. Pieces have to be placed on a four inch Si wafer with cool grease, or with a kapton tape.
• Standard Recipes:

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