IEN - Micro/Nano Fabrication Facility
1. New User Preparation

This section is for New Cleanroom Users to quickly find the information they need to be successful working in the GT IEN Cleanrooms.

  • Necessary Items:                   This section shows the items that users should bring to cleanroom and items IEN provides
  • Preparing Process Flow:      This presentation gives users instruction on how to prepare their process flow
  • Cleanroom Layout:                This section shows a map of the cleanroom with tool locations identified
  • Supporting Staff:                   This section provides an overview of the current IEN cleanroom staff


Contact Information
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332

For process support please click below