This section contains the standard recipes for GT ALD equipment:

• Plasma Enhanced ALD Recipes: Al₂O₃, AlN, Pt
• Thermal ALD Recipes: Al₂O₃, HfO₂, ZrO₂, TiO2

Cambridge NanoTech ALD:

• Location: Marcus Inorganic Cleanroom
• Sample Size: Pieces up to 8" wafer, or two 4" wafers.

Plasma Recipes

Thermal Recipes