IEN- Micro/Nano Fabrication Facility
3.4 ALD Recipes

This section contains the standard recipes for GT ALD equipment:


Cambridge NanoTech ALD:

  • Location: Marcus Inorganic Cleanroom
  • Sample Size: Pieces up to 8" wafer, or two 4" wafers.

Plasma Recipes

Cambridge Plasma ALD Pt Recipe


Thermal Recipes



Contact Information
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332

For process support please click below